<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Hichem Ferhati</style></author><author><style face="normal" font="default" size="100%">Fayçal Djeffal</style></author><author><style face="normal" font="default" size="100%">Bendjerad, Adel</style></author><author><style face="normal" font="default" size="100%">A Saidi</style></author><author><style face="normal" font="default" size="100%">Benhaya, Abdelhamid</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Novel solar-blind ultraviolet photodetector based on inserting sputtered ITO ultrathin film for integrated silicon photonics platform</style></title><secondary-title><style face="normal" font="default" size="100%">Superlattices and Microstructures </style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">2020</style></year></dates><urls><web-urls><url><style face="normal" font="default" size="100%">https://www.sciencedirect.com/science/article/abs/pii/S074960362030224X</style></url></web-urls></urls><volume><style face="normal" font="default" size="100%">143</style></volume><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">&lt;p style=&quot;text-align: justify;&quot;&gt;
	In this paper, a new&amp;nbsp;&lt;em&gt;UV-&lt;/em&gt;photodetector&amp;nbsp;&lt;em&gt;(UV PD)&lt;/em&gt;&amp;nbsp;design based on non-hydrogenated amorphous-silicon (&lt;em&gt;a-Si&lt;/em&gt;) was fabricated using&amp;nbsp;&lt;em&gt;RF&lt;/em&gt;&amp;nbsp;magnetron sputtering&amp;nbsp;technique. The proposed structure consists on sputtering an&amp;nbsp;&lt;em&gt;ITO&lt;/em&gt;&amp;nbsp;thin-film acting as a passivation layer on the&amp;nbsp;&lt;em&gt;a-Si&lt;/em&gt;&amp;nbsp;layer to form a&amp;nbsp;heterostructure&amp;nbsp;design compatible with silicon photonics technology.&amp;nbsp;&lt;em&gt;X&lt;/em&gt;-Ray Diffraction (&lt;em&gt;XRD&lt;/em&gt;) and&amp;nbsp;&lt;em&gt;UV–Vis&lt;/em&gt;&amp;nbsp;spectra were carried out to assess the device structural and optical properties. Measurements emphasized the amorphous state of the sputtered&amp;nbsp;&lt;em&gt;Si&lt;/em&gt;&amp;nbsp;thin-film. Interestingly, it was found that the elaborated device shows an exciting&amp;nbsp;&lt;em&gt;UV&lt;/em&gt;&amp;nbsp;absorption capability (over than&amp;nbsp;&lt;em&gt;95%&lt;/em&gt;) with drastically reduced visible photoresponse. The elaborated&amp;nbsp;&lt;em&gt;ITO/a&lt;/em&gt;-&lt;em&gt;Si UV PD&lt;/em&gt;&amp;nbsp;exhibits an ultra-low dark current less than&amp;nbsp;&lt;em&gt;1&amp;nbsp;pA&lt;/em&gt;, a good responsivity of&amp;nbsp;&lt;em&gt;0.&lt;/em&gt;13 A/W and a high&amp;nbsp;&lt;em&gt;I&lt;/em&gt;&lt;sub&gt;&lt;em&gt;ON&lt;/em&gt;&lt;/sub&gt;&lt;em&gt;/I&lt;/em&gt;&lt;sub&gt;&lt;em&gt;OFF&lt;/em&gt;&lt;/sub&gt;&amp;nbsp;ratio of&amp;nbsp;&lt;em&gt;2.5&amp;nbsp;×&amp;nbsp;10&lt;/em&gt;&lt;sup&gt;&lt;em&gt;4&lt;/em&gt;&lt;/sup&gt;. Besides, the device demonstrates a high&amp;nbsp;&lt;em&gt;UV-to-Vis&lt;/em&gt;&amp;nbsp;ratio exceeding&amp;nbsp;&lt;em&gt;2.3&amp;nbsp;×&amp;nbsp;10&lt;/em&gt;&lt;sup&gt;&lt;em&gt;3&lt;/em&gt;&lt;/sup&gt;, thus confirming its visible blindness property. These enhancements are attributed to the role of&amp;nbsp;&lt;em&gt;ITO/a-Si&lt;/em&gt;&amp;nbsp;heterostructure&amp;nbsp;in promoting near-perfect&amp;nbsp;&lt;em&gt;UV&lt;/em&gt;&amp;nbsp;absorption. In addition, this structure generates an electric field acting as effective driving force of the photo-induced&amp;nbsp;&lt;em&gt;e/h&lt;/em&gt;&amp;nbsp;pairs, which leads to enhance the device generation/collection efficiency. Therefore, the use of&amp;nbsp;&lt;em&gt;ITO/a-Si&lt;/em&gt;&amp;nbsp;design opens up new pathways for designing novel solar-blind&amp;nbsp;&lt;em&gt;UV PDs&lt;/em&gt;&amp;nbsp;potentially appropriate for integrated silicon photonics technology.
&lt;/p&gt;
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