@article {6772,
	title = {Effects of annealing process on the structural and photodetection properties of new thin-film solar-blind UV sensor based on Si-photonics technology},
	journal = {Materials Science in Semiconductor Processing},
	volume = {121},
	year = {2021},
	abstract = {In this paper, a new\&nbsp;heterojunction\&nbsp;structure based on ultrathin-film\&nbsp;ITO\&nbsp;sputtered on non-hydrogenated amorphous-silicon (a-Si) is developed for high-detectivity solar-blind\&nbsp;UV-photodetector\&nbsp;(UV-PD)\&nbsp;based on silicon (Si) photonics technology. A strategic combination of\&nbsp;Particle Swarm Optimization\&nbsp;(PSO)\&nbsp;and numerical analysis is used to find out the best design offering superior optoelectronic performance. The\&nbsp;optimized design\&nbsp;is then elaborated using\&nbsp;RF\&nbsp;magnetron sputtering\&nbsp;technique. A comprehensive investigation of the device structural and optoelectronic properties was carried out, incorporating the influence of heat treatment at temperature values ranging from\&nbsp;300{\textdegree}C\&nbsp;to\&nbsp;600{\textdegree}C.\&nbsp;X-Ray Diffraction (XRD) measurements indicate that the\&nbsp;crystallinity\&nbsp;of the sputtered layers was enhanced by increasing the annealing temperature. Significantly, photoelectrical characterization showed that the annealed\&nbsp;ITO/a-Si UV-PD\&nbsp;exhibits high detectivity exceeding\&nbsp;1013\&nbsp;Jones with a highly improved\&nbsp;UV-to-Vis\&nbsp;rejection ratio of\&nbsp;5.7\&nbsp;{\texttimes}\&nbsp;103. The\&nbsp;ITO/a-Si\&nbsp;heterojunction generated a built-in potential, enabling effective separation and transport of photo-induced carriers, thereby reducing\&nbsp;recombination losses. Therefore, by well optimizing the proposed\&nbsp;heterostructure\&nbsp;and the annealing conditions, we were able to elaborate new highly detective, thin-film solar-blind\&nbsp;UV-PD\&nbsp;based on\&nbsp;Si-photonics platform, which can be a promising alternative for future high-performance and cost-effective optoelectronic systems.},
	url = {https://www.sciencedirect.com/science/article/abs/pii/S136980012031266X},
	author = {Hichem Ferhati and Fay{\c c}al Djeffal and A Saidi and Benhaya, Abdelhamid and Bendjerad, Adel}
}
