@article {6764,
	title = {Post-annealing effects on RF sputtered all-amorphous ZnO/SiC heterostructure for solar-blind highly-detective and ultralow dark-noise UV photodetector},
	journal = {Journal of Non-Crystalline Solids},
	volume = {574},
	year = {2021},
	abstract = {
	The rapid progress of wide band gap SiC semiconductor material opens up new opportunities to develop efficient monolithically integrated ultraviolet (UV) photonic and power systems for a wide range of advanced applications. In this paper, low-noise solar-blind UV\&nbsp;photodetector\&nbsp;(PD) based on all-amorphous ZnO/SiC\&nbsp;heterostructure\&nbsp;was fabricated via RF\&nbsp;magnetron sputtering\&nbsp;technique. The device structural and optical properties were investigated before and after thermal treatment at different annealing temperature values varying from 300\&nbsp;{\textdegree}C to 600\&nbsp;{\textdegree}C. UV-Visible\&nbsp;spectroscopy revealed that the annealing process has a beneficial effect in terms of high UV absorbance and solar-blindness properties. Photoelectrical characterization demonstrated the high UV photoresponse and low dark noise of the prepared UV PD based on all-amorphous ZnO/SiC structure. Improvement of the device performances were achieved by an appropriate annealing process. After post-annealing, the thermally treated ZnO/SiC UV PD at 500\&nbsp;{\textdegree}C exhibits a high detectivity of 2.4\&nbsp;{\texttimes}\&nbsp;1012\&nbsp;Jones, high\&nbsp;signal to noise ratio\&nbsp;of 2.64{\texttimes}105\&nbsp;and a giant UV{\textendash}Vis\&nbsp;rejection ratio of 5.9\&nbsp;{\texttimes}\&nbsp;103. Therefore, the present study may provide new perspectives for fabricating ultralow dark noise solar-blind UV PD based on all-amorphous ZnO/SiC heterostructure, which promotes the development of integrated UV photonic systems based on SiC platform.

},
	url = {https://www.sciencedirect.com/science/article/abs/pii/S0022309321005317},
	author = {Hichem Ferhati and Fay{\c c}al Djeffal and Bendjerad, Adel and A Saidi and Benhaya Abdelhamid}
}
