@proceedings {4658,
	title = {Modeling and Optimization Techniques of Boron diffusion parameters in MOS transistor Using SILVACO ATHENA and Matlab},
	journal = {First International Symposium on Dielectric Materials and Applications},
	year = {2016},
	url = {http://www.mrforum.com/product/9781945291197-19/},
	author = {R amdane Mahamdi}
}
