@proceedings {4656,
	title = {Boron and Phosphorus Diffusion in MOS Transistors: Simulation and analyze in both 2D and 3D},
	journal = {International Conference on Phosphorus, Boron and Silicon 2017},
	year = {2017},
	url = {http://premc.org/doc/PBSI2017/PBSI2017_Book_Of_Abstracts.pdf},
	author = {Naima Guenifi}
}
