@proceedings {4654,
	title = {An algorithm For Boron diffusion in MOS transistor Using SILVACO ATHENA and Matlab},
	journal = {International Conference on Phosphorus, Boron and Silicon 2017},
	year = {2017},
	url = {http://premc.org/doc/PBSI2017/PBSI2017_Book_Of_Abstracts.pdf},
	author = {Naima Guenifi}
}
