@article {4082,
	title = {Optimized high-performance ITO/Ag/ITO multilayer transparent electrode deposited by RF magnetron sputtering},
	journal = {Superlattices and Microstructures},
	volume = {129},
	number = {3},
	year = {2019},
	pages = {176-184},
	abstract = {This paper presents the optimization, elaboration and characterization of a new\&nbsp;TCO\&nbsp;(Transparent Conductive Oxides)\&nbsp;electrode\&nbsp;based on\&nbsp;ITO/Ag/ITO\&nbsp;multilayer design that enables overcoming the trade-off between the electrical and optical properties. A new hybrid approach combining the investigated design and Particle Swarm Optimization (PSO) technique is conducted with the aim of maximizing the\&nbsp;Haacke\&nbsp;Figures of merit (FoM). It is found that the optimized\&nbsp;ITO/Ag/ITO\&nbsp;tri-layered design paves a new path toward achieving a high\&nbsp;FoM\&nbsp;of\&nbsp;125 {\texttimes} 10-3Ω-1. Such improvement is attributed to the improved light management achieved by the efficient modulation of the\&nbsp;Ag\&nbsp;sub-layer geometry. Subsequently, the optimized multilayer design is fabricated using\&nbsp;RF\&nbsp;magnetron sputtering\&nbsp;technique. The structural, optical and electrical properties associated with the deposited\&nbsp;ITO/Ag/ITO\&nbsp;multilayer structure\&nbsp;are also analyzed. It is found that the fabricated\&nbsp;TCO-based electrode shows a high\&nbsp;transmittance\&nbsp;over than\&nbsp;94.1\%\&nbsp;and a low sheet resistance of\&nbsp;4.5Ω {\texttimes} sq-1, which is in good agreement with the theoretical predictions. Therefore, the proposed design methodology based on experiments assisted by\&nbsp;PSO\&nbsp;metaheuristic approach offers exciting opportunities for bridging the gap between transparency and\&nbsp;conductivity\&nbsp;characteristics. This makes the elaborated\&nbsp;ITO/Ag/ITO\&nbsp;multilayer design suitable for high-performance optoelectronic applications.},
	url = {https://www.sciencedirect.com/science/article/abs/pii/S0749603619304835},
	author = {Hichem Ferhati and Fay{\c c}al Djeffal and Benhaya, Abdelhamid}
}
