@article {4081,
	title = {Effects of annealing temperature and ITO intermediate thin-layer on electrical proprieties of Au/p-Si structure deposited by RF magnetron sputtering, ISSN 0749-6036},
	journal = {Superlattices and Microstructures },
	volume = {128},
	year = {2019},
	pages = {382-391},
	abstract = {In this paper, a new\&nbsp;Au/p-Si\&nbsp;Schottky Barrier\&nbsp;Diode (SBD) based on\&nbsp;Indium\&nbsp;Tin Oxide (ITO) intermediate\&nbsp;thin-film\&nbsp;is proposed and experimentally investigated by including the annealing\&nbsp;temperature effect. We elaborated the\&nbsp;Au/ITO/p-Si\&nbsp;structure by means of\&nbsp;RF\&nbsp;magnetron sputtering\&nbsp;technique and compared its electrical properties with the conventional\&nbsp;Au/p-Si SBD. The role of the annealing process at\&nbsp;200\&nbsp;and\&nbsp;400 {\textdegree}C\&nbsp;as well as the\&nbsp;ITO\&nbsp;interface thin-layer in improving the\&nbsp;SBD\&nbsp;basic electrical parameters is analyzed. The characterization has revealed that a higher Schottky barrier (ϕb) of\&nbsp;0.79V\&nbsp;is achieved. Moreover, close to unit ideality factor of (n = 1.25) and reduced density of states (Nss = 1.5 {\texttimes} 1012cm-2) and series resistance of (Rs = 32Ω) are recorded. These achievements can be attributed to the enhanced interface quality provided by introducing the\&nbsp;ITO\&nbsp;thin-film. Moreover, the annealing process enables improved\&nbsp;crystallinity\&nbsp;and allows efficient rearrangement of atoms at the interfaces. The thermal stability behavior of the investigated designs is analyzed, where new Figure of Merit (FoMs) parameters are proposed. It is found that the annealed\&nbsp;Au/ITO/p-Si\&nbsp;structure offers the opportunity for suppressing the degradation related-heating effects. Therefore, the proposed\&nbsp;Au/ITO/p-Si SBD\&nbsp;pinpoint a new path toward achieving superior electrical characteristics and improved thermal stability, which makes it a potential alternative for high-performance microelectronic and optoelectronic applications.},
	url = {https://www.sciencedirect.com/science/article/abs/pii/S0749603618324765},
	author = {Djeffal Fay{\c c}al and Hichem Ferhati and Benhaya, Abdelhamid and Bendjerad, Adel}
}
